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POWER Series Cryo Pumps

Cryo Pumps

  • Enables safe and high speed regeneration without heater
  • Excellent startup characteristic and temperature stability
  • Reduced vibration (less than 1/10 compared to our previous product)
  • Wide range of applications:
    • Semiconductor manufacturing equipment (sputtering equipment, ion implantation equipment, etc.)
    • Electronic component manufacturing equipment
    • Vacuum evaporation systems
    • Vacuum furnaces, space chambers
    • Accelerators
    • Various other high vacuum equipment

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† Prices and specifications subject to change without notice. Actual prices are determined by individual dealers and may vary.

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