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M-080QA-HPM Quadrupole Mass Spectrometers

Quadrupole Mass Spectrometers

  • Seamless measurement from process pressure (1.3 Pa) to ultrahigh vacuum
  • Detecting H2 with high sensitivity in deposition process
  • Long maintenance cycle and low running cost
  • Easily identify problems in production with various alarm functions

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† Prices and specifications subject to change without notice. Actual prices are determined by individual dealers and may vary.

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